Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)

The Korean Institute of Electrical Engineers (대한전기학회)
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A Study on the Development of Thin Film Type Humidity Sensor Materials by Sol-Gel Method (III)

졸겔법에 의한 박막형 습도센서 소재개발에 관한 연구 (III)

  • You, D.H. (Dept. of Electrical Eng., Ansan Tech. Col.) ;
  • Kang, D.H. (Dept. of Electrical Eng., Pusan Nat'l Univ. of Tech.) ;
  • Lee, E.H. (Dept. of Electrical Eng., Hanla Tech. Col.) ;
  • Yuk, J.H. (Dept. of Electrical Eng., Yuhan Jr. Col.) ;
  • Jeong, S.Y. (Dept. of Electrical Eng., Pusan Jr. Col.) ;
  • Lee, D.C. (Dept. of Electrical Eng., Inha Univ.)
  • Published : 1995.07.20
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Abstract

In this paper, $TiO_2$-xmol%$V_2O_5$, x=0.0, 1.0, 2.0, 3.0 specimens are fabricated by Sol-Gel method. For the improvement of humidity sensitive characteristics for specimens, their microstructures are analysed and the optimum processing condition is established. Grain size increases with substitution rate of $V^{5+}$, on $Ti^{4+}$ site. Their humidity sensitive characteristics is good at 1mol% of $V_2O_5$ rate and heat-treated at $700^{\circ}C$. The capacitance of specimens decreases with frequency.

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