Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)

The Korean Institute of Electrical Engineers (대한전기학회)
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Design and Fabrication of Micro Gripper Using Electrostatic Force

정전력을 이용한 마이크로 그리퍼의 설계 및 제작

  • Ahn, Dong-Sup (Department of Electrical Engineering, Seoul National University) ;
  • Kim, Yong-Kweon (Department of Electrical Engineering, Seoul National University)
  • Published : 1994.11.18
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Abstract

A comb drive electrostatic micro gripper was designed and fabricated. We designed it analytically using electrostatic force and cantilever deflection equation. In fabrication, we used LIGA-like technology consisted of Ni electroplating through polyimide patterned by $O_2$ Plasma RIE and Al sacrificial layer. This micro gripper was designed to handle an optical fiber which is $125{\mu}m$ in diameter.

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