Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)
- 1994.11a
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- Pages.416-418
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- 1994
Fabrication of a Polysilicon Piezoresistive Accelerometer Using $p^+$ Cantilever Beams
$p^+$ 컨틸레버 빔을 이용한 다결정 실리론 압저항 가속도계의 제작
- Ji, Y.H. (Department of Control and Instrumentation Engineering AJOU University) ;
- Yang, E.H. (Department of Control and Instrumentation Engineering AJOU University) ;
- Yang, S.S. (Department of Control and Instrumentation Engineering AJOU University)
- Published : 1994.11.18
Abstract
In this study, a silicon piezoresistive accelerometer is designed and fabricated using
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