Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)
- 1994.11a
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- Pages.413-415
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- 1994
Estimation of the Stress Profile of $p^+$ Silicon Films Using Stress Measurement Structures
응력측정 구조를 이용한 $p^+$ 박막의 응력분포 추정
- Yang, E.H. (Dept. of Control and Instr. Eng. AJOU University) ;
- Yang, S.S. (Dept. of Control and Instr. Eng. AJOU University) ;
- Park, E.J. (Dept. of Mechanical Eng. AJOU University) ;
- Yoo, S.H. (Dept. of Mechanical Eng. AJOU University)
- Published : 1994.11.18
Abstract
In this paper, a new technique for quantitative estimation of the stress profile along the depth of
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