대한전기학회:학술대회논문집 (Proceedings of the KIEE Conference)
- 대한전기학회 1994년도 추계학술대회 논문집 학회본부
- /
- Pages.281-283
- /
- 1994
평판형유도결합플라즈마의 임피던스특성 측정 및 수치해석
Measurement and Numerical Analysis of Impedance Characteristics of Planar ICP
- Yang, Il-Dong (Electrical Engineering Department, Seoul National University) ;
- Lee, Ho-Joon (Electrical Engineering Department, Seoul National University) ;
- Whang, Ki-Woong (Electrical Engineering Department, Seoul National University)
- 발행 : 1994.11.18
초록
The impedance characteristics of planar ICP have been measured and compared with the theoretical results obtained by the field equation. The resistance of the total impedance had a maximum point and the inductance decreased monotonically as the electron density increased from
키워드