Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)
- 1994.11a
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- Pages.246-248
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- 1994
Electrical Properties of Thin $SiO_2$ Film by Rapid Thermal Process
Rapid Thermal Process에 의해 형성시킨 얇은 산화막의 전기적 특성
- Lee, Cheol-Jin (Department of Electrical Engineering Kunsan National Univ.) ;
- Sung, Man-Young (Department of Electrical Engineering Korea Univ.) ;
- Sung, Young-Kwon (Department of Electrical Engineering Korea Univ.)
- Published : 1994.11.18
Abstract
The Electrical properties of thin
Keywords