Proceedings of the Materials Research Society of Korea Conference (한국재료학회:학술대회논문집)
- 1994.05a
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- Pages.134-134
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- 1994
An investigation of the thickness measurements of thin $SiO_2$ using FT-IR and Ellipsometry
FT-IR 을 이용한 $SiO_2$ 초박막의 두께 측정 및 Ellipsometry 방법과의 비교연구
Abstract
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