Proceedings of the Materials Research Society of Korea Conference (한국재료학회:학술대회논문집)
- 1994.05a
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- Pages.131-131
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- 1994
A study on the deposition characteristics of diamond films deposited by microwave plasma CVD
Microwave Plasma를 이용하여 증착한 diamond 박막의 증착변수에 따른 증착특성 연구
Abstract
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