Proceedings of the Materials Research Society of Korea Conference (한국재료학회:학술대회논문집)
- 1994.05a
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- Pages.108-108
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- 1994
Preparation and Characterization of PLT Thin Films for ULSI DRAM Capacitor Dielectric
256M DRAM 급 이상의 Capacitor 유전체용 PLT 박막의 제조 및 특성평가
Abstract
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