Proceedings of the Materials Research Society of Korea Conference (한국재료학회:학술대회논문집)
- 1994.05a
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- Pages.86-87
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- 1994
Interfacial Propeties of Thin $Ta_{2}O_{5}$ Films by MOCVD
MOCVD법에 의한 $Ta_{2}O_{5}$ 박막의 계면물성
Abstract
Keywords