일렉트로크로믹 MoO$_3$ 박막의 제조 및 특성

Preparation and Characterization of Electromic MoO$_3$Thin Films

  • 서동규 (수원대학교 전자재료공학과) ;
  • 조봉희 (수원대학교 전기공학과) ;
  • 김영호 (수원대학교 전자재료공학과)
  • 발행 : 1994.11.01

초록

We have investigated the optical and electrochromic properties of molybdenum oxide(MoO$_3$) films by thermal evaporation. The MoO$_3$films deposited at substrate temperatures below 200$^{\circ}C$ are found to be amorphous and annealed films at temperature 300$^{\circ}C$ for 1 hour in air are crystalline. The optical energy gap calculated from the transmittance and reflectance spectra of MoO$_3$ films is near 2.75 eV and 3.25 eV for amorphous films and crystalline films, respectively. The MoO$_3$ thin films exhibit light blue to dark blue optical modulation on lithium intercalation and have a uniform transmittance modulation over a wavelength range of 300∼1100 nmcompared to tungsten oxide films.

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