한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)

한국전기전자재료학회 (The Korean Institute of Electrical and Electronic Material Engineers)
권호 표지

Zinc acetate를 precursor로 하여 증착한 $ZnO_{x}$막의 특성

Characteristics of $ZnO_{x}$ films deposited by using zinc acetate as precursor

  • 발행 : 1994.11.01

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초록

$ZnO_{x}$ films were deposited by conventional thermal evaporation method. Zinc acetate was used as precursor. XRD and SEM results shows films as mixed stats of ZnO and zinc acetate. And EDX measurements reseal composition of films as $ZnO_{x}$.

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