Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 1994.06a
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- Pages.158.2-158
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- 1994
Vacuum SR Lithograpphy with Using pplasma ppolymerized Organo-silicon Resist
- Shinzo-Morita (Center of Co-opperative Research on Advanced Science and Technology Nagoya University) ;
- Geo (Center of Co-opperative Research on Advanced Science and Technology Nagoya University)
- Published : 1994.06.01
Abstract
Keywords