한국진공학회:학술대회논문집 (Proceedings of the Korean Vacuum Society Conference)
- 한국진공학회 1994년도 제7회 학술발표회 및 한·일 CVD 심포지움 논문개요집
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- Pages.154.2-154
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- 1994
Characterials of Diamond Thin Film under MppECVD system
- Kim, S.H. (New Materials Lab., Samsung Advanced Institute of Technology) ;
- Park, Y.S. (New Materials Lab., Samsung Advanced Institute of Technology) ;
- Jung, S.K. (New Materials Lab., Samsung Advanced Institute of Technology) ;
- Lee, J.W. (New Materials Lab., Samsung Advanced Institute of Technology)
- 발행 : 1994.06.01