Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 1994.06a
- /
- Pages.154.2-154
- /
- 1994
Characterials of Diamond Thin Film under MppECVD system
- Kim, S.H. (New Materials Lab., Samsung Advanced Institute of Technology) ;
- Park, Y.S. (New Materials Lab., Samsung Advanced Institute of Technology) ;
- Jung, S.K. (New Materials Lab., Samsung Advanced Institute of Technology) ;
- Lee, J.W. (New Materials Lab., Samsung Advanced Institute of Technology)
- Published : 1994.06.01
Abstract
Keywords