Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)

1994.02a
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Pages.23-23
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1994

The Korean Vacuum Society (한국진공학회)

권호 표지

Down-Sizing Clean and Dry Turbomolecular Pumping

진공분과 초청발표

Ormrod, S.E. (Edwards High Wacuum International, Crawley,UK) ;
Schofield, N. (Edwards High Wacuum International, Crawley,UK) ;
Wong, D.C. (Edwards High Wacuum International, Crawley,UK)

Published : 1994.02.01

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