Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 1994.02a
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- Pages.10-10
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- 1994
ION BEAM RESEARCH IN SIM
박막분과 초청발표
- Liu Xianghuai (Ion Beam Lab., Shanghai Institute of Metallurgy, Chinese Academy of Science) ;
- Yang Genqing (Ion Beam Lab., Shanghai Institute of Metallurgy, Chinese Academy of Science) ;
- Zou Shichang (Ion Beam Lab., Shanghai Institute of Metallurgy, Chinese Academy of Science)
- Published : 1994.02.01
Abstract
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