Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 1994.02a
- /
- Pages.4-4
- /
- 1994
Semiconductor Etching with Halogens : STM Investigations
총회 초청발표 (I 회의장)
- Weaver, J.H. (Department of Materials Science and Chemical Engineering University of Minnesota)
- Published : 1994.02.01
Abstract
Keywords