한국진공학회:학술대회논문집 (Proceedings of the Korean Vacuum Society Conference)
- 한국진공학회 1994년도 제7회 학술발표회 및 한·일 CVD 심포지움 논문개요집
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- Pages.155-156
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- 1994
Diamond Film Synthesis at Low Temperature by Pulse Modulated ECR Plasma CVD
- Hatta, Akimitsu (Department of Electrical Engineering, Osaka University) ;
- Hiraki, Akio (Department of Electrical Engineering, Osaka University)
- 발행 : 1994.06.01