Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 1994.06a
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- Pages.155-156
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- 1994
Diamond Film Synthesis at Low Temperature by Pulse Modulated ECR Plasma CVD
- Hatta, Akimitsu (Department of Electrical Engineering, Osaka University) ;
- Hiraki, Akio (Department of Electrical Engineering, Osaka University)
- Published : 1994.06.01
Abstract
Keywords