Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 1994.06a
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- Pages.109-109
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- 1994
UV/ozone Ethcing Processes of Organic Films on Si Studied by XPS and AFM
- Kyung Woo Lee (Deppartment of Materials Science and Engineering, Ulsan University) ;
- Kyung Joong Kim (Surface Analysis Groupp, Korea Research Institute of Standards and Science) ;
- Hui-Gon Chun (Deppartment of Materials Science and Engineering, Ulsan University) ;
- Kang Ho Ahn (Korea Research Institute of Manufacturing Technology) ;
- Inchul John (Deppartment of Chemistry, Chunbuk University) ;
- Dae Won Moon (Surface Analysis Groupp, Korea Research Institute of Standards and Science)
- Published : 1994.06.01
Abstract
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