Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)

The Korean Vacuum Society (한국진공학회)
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Deposition of Cu films on Si substrates by Ionized Cluster Beam

Ionized Cluster Beam에 의한 Si 기판 위에 Cu 박막 증착

  • Ki-hwan Kim (Deppartment of Ceramic Engineering, Yonsei University) ;
  • Du- (Deppartment of Ceramic Engineering, Yonsei University)
  • Published : 1994.06.01
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