Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 1994.06a
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- Pages.77-78
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- 1994
The Role of Surface Hydride and Fluoride in Low-Tempperature Si CVD (Application of in-situ FTIR Technique)
- Chung, Chan-Hwa (Dept. of Chemical Engineering, Seoul Nat`l University) ;
- Moon, Sang-Heup (Dept. of Chemical Engineering, Seoul Nat`l University)
- Published : 1994.06.01
Abstract
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