Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 1994.02a
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- Pages.148-150
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- 1994
A Study on the electromigration pphenomenon in Al-1%Si metallization under D.C and Pulsed D.C conditions
D.C와 Pulsed D.C조건하에서의 Al-1%Si박막금속화의 Electromigration현상에 관한 연구.
Abstract
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