Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 1994.02a
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- Pages.141-143
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- 1994
OMCVD Growth of Boron Nitride Films from single Molecular Precursors
- Boo, Jin-Hyo (Inorganic Materials Division, Korea Research Institute of Chemical Technology) ;
- Yu, Kyu-Sang (Inorganic Materials Division, Korea Research Institute of Chemical Technology) ;
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Kim, Yunsoo
(Inorganic Materials Division, Korea Research Institute of Chemical Technology)
;
- Kim, Younsoo (Department of Chemistry, Korea Advanced Institute of Science and Technology) ;
- Park, Joon-T. (Department of Chemistry, Korea Advanced Institute of Science and Technology)
- Published : 1994.02.01
Abstract
Keywords