Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 1994.02a
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- Pages.93-95
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- 1994
The Growth of Cubic SiC Films by OMCVD Using Single Molecular Precursors
- Jin-Hyo Boo (Inorganic Materials Division Korea Research Institute of Chemical Technology) ;
- Kyu-Sang Yu (Inorganic Materials Division Korea Research Institute of Chemical Technology) ;
- Moonhee Lee (Inorganic Materials Division Korea Research Institute of Chemical Technology) ;
- Yunsoo Kim (Inorganic Materials Division Korea Research Institute of Chemical Technology)
- Published : 1994.02.01
Abstract
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