제어로봇시스템학회:학술대회논문집
- 제어로봇시스템학회 1994년도 Proceedings of the Korea Automatic Control Conference, 9th (KACC) ; Taejeon, Korea; 17-20 Oct. 1994
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- Pages.611-615
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- 1994
Capacitive force sensor
- Miyazawa, S. (Mechanical Engineering Laboratory) ;
- Usui, Y. (Mechanical Engineering Laboratory) ;
- Suzuki, M. (Lubycon Co.,Ltd) ;
- Baba, S. (Lubycon Co.,Ltd)
- 발행 : 1994.10.01
초록
In this paper, the sensitivity, linearity and temperature drift characteristics of various capacitive force sensors are evaluated and compared using new experimental methods. In particular, two designs were employed to reduce temperature drift. Both types of sensor use high-sensitivity Al coated PET film, and their externals are miniaturized. The first has a layered design consisting of two dielectric substances with different temperature characteristics. The prototype of this design had a temperature drift of only 0.1% of the sensor's capacity in the 20-80.deg. C range. The second type uses both a dummy sensor ind an active sensor with the same characteristics. The temperature drift of the prototype was one-fifth the temperature drift of a single sensor.
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