Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)

The Korean Institute of Electrical Engineers (대한전기학회)
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Detailed Comparison of Discharge Characteristics of both FTS and CPMS Systems

FTS와 CPMS 시스템의 방전특성비교

  • 곽동주 (경성대학교 전기공학과) ;
  • 성열문 (부산대학교 전기공학과) ;
  • 박정후 (부산대학교 전기공학과) ;
  • 하판규 (한전 서울연수원 배전교수실)
  • Published : 1994.07.21
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Abstract

Both Facing Target Sputtering(FTS) and Cylindrical Post-Magnetron Sputtering(CPMS) systems have been degigned in order to form high density plasma and to obtain high deposition rate. However, these two systems have some different applications, and discharge characteristics of these two systems are not well known. In this paper, the discharge characteristics and plasma parameters of both FTS and CPMS systems are studied experimentally. It is found that these two system show some different discharge characteristics under magnetic fields. The plasma density and electron temperature of these two systems are in the range of $10^{10}{\sim}10^{11}[cm^{-3}]$ and $3.5{\sim}5.5[eV]$, respectively.

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