대한전기학회:학술대회논문집 (Proceedings of the KIEE Conference)
- 대한전기학회 1994년도 하계학술대회 논문집 C
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- Pages.1493-1495
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- 1994
MWPECVD법에 의한 Diamond합성에 있어서 수소류양과 메탄농도의 영향
A Study on the effect of hydrogen flow rate and $CH_4$ concentration in deposition of the diamond thin films by MWPECVD
- Cho, J.K. (Dept. of Elec. Eng. kyung-nam univ.) ;
- Park, S.T. (Dept. of Elec. Eng. kyung-nam univ.) ;
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Park, S.H.
(Dept. of Elec. Eng. kyung-nam univ.) ;
- Geun, H.K. (Dept. of Elec. Eng. kyung-nam univ.) ;
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Park, J.C.
(Dept. of Electronics Yeung-Jin Junior College)
- 발행 : 1994.07.21
초록
Study on the effect of hydrogen flow rate and
키워드