Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)

The Korean Institute of Electrical Engineers (대한전기학회)
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The dependence of edge effect on film thickness in thin insulating films

얇은 절연막에서의 단부효과에 관한 막두께 의존성

  • Chu, K.S. (Dept. of Electrical Eng. Korea University) ;
  • Jo, T.H. (Dept. of Electrical Eng. Korea University) ;
  • Joo, Y.J. (Dept. of Electrical Eng. Korea University) ;
  • Lee, K.Y. (Dept. of Electrical Eng. Korea University) ;
  • Sung, Y.K. (Dept. of Electrical Eng. Korea University)
  • 추교섭 (고려대학교 공과대학 전기공학과) ;
  • 조태훈 (고려대학교 공과대학 전기공학과) ;
  • 주유진 (고려대학교 공과대학 전기공학과) ;
  • 이경윤 (고려대학교 공과대학 전기공학과) ;
  • 성영권 (고려대학교 공과대학 전기공학과)
  • Published : 1994.07.21
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Abstract

This paper deals with the edge effect in thin insulating films, focusing on their dependence on film thickness, so we derived a simple mathematical form which depicts that reducing film thickness lowers the field at the electrode edge. we expect that this result may be suitable to problems with multi level insulating films.

Keywords