대한전기학회:학술대회논문집 (Proceedings of the KIEE Conference)
- 대한전기학회 1994년도 하계학술대회 논문집 C
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- Pages.1391-1393
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- 1994
실리콘 마이크로브리지를 이용한 유량센서
Thermal Flow Sensor Using Silicon Microbridges
- Yang, Joon-Young (Korea University) ;
-
Min, Nam-Ki
(Korea University)
;
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Min, Suk-Ki
(KIST)
- 발행 : 1994.07.21
초록
A silicon microbridge flow sensor has been developed. The heat transfer within silicon microbridge is modeled to predict the characteristics of the sensor. The flow sensor shows high sensitivity at small flow rate. This device is simple to fabricate, using standard IC and micromachining technology.
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