Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)
- 1994.07b
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- Pages.1301-1304
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- 1994
Al Doping and Post Annealing Effects of Pyrosol Deposited ZnO Thin Films
Pyrosol 법에 의한 ZnO 투명전도막의 Al Doping 및 열처리 효과
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Song, Jin-Soo
(Korea Inst. of Energy Research) ;
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Yu, Kwon-Jong
(Korea Inst. of Energy Research) ;
- Lee, Chang-Hyun (Korea Advanced Institute of Science and Technology) ;
- Cho, Woo-Yeong (Korea Advanced Institute of Science and Technology) ;
- Lim, Keong-Su (Korea Advanced Institute of Science and Technology) ;
- Eom, Young-Chang (Research Center of KEPCO)
- Published : 1994.07.21
Abstract
ZnO transparent conducting oxide thin films have been prepared by Pyrosol deposition method. The effect of the Al doping with varying Al/Zn mole ratio and the post-deposition heat treatment on the electrical resistivity and optical transmittance of the prepared films have been investigated. From the experimental results, the ZnO:Al thin films with resistivity as low as
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