대한전기학회:학술대회논문집 (Proceedings of the KIEE Conference)
- 대한전기학회 1994년도 하계학술대회 논문집 C
- /
- Pages.1239-1242
- /
- 1994
엑시머 레이저를 이용하여 결정화한 PECVD 및 LPCVD 비정질 실리콘 박막의 특성 분석
An Analysis of Characteristics of PECVD and LPCVD a-Si Films Crystallized by Excimer Laser
- Jang, K.H. (Department of Electrical Eng., Seoul National University) ;
- Lee, S.K. (Department of Electrical Eng., Seoul National University) ;
- Jun, M.C. (Department of Electrical Eng., Seoul National University) ;
- Han, M.K. (Department of Electrical Eng., Seoul National University)
- 발행 : 1994.07.21
초록
We have characterized XeCl excimer-laser-induced crystallization of thin amorphous silicon films deposited by PECVD (
키워드