대한전기학회:학술대회논문집 (Proceedings of the KIEE Conference)

대한전기학회 (The Korean Institute of Electrical Engineers)
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다결정실리콘 박막의 센서에의 응용

Applications of Polycrystalline Silicon Layer to Sensors

  • Park, Sung-June (Department of Electrical Engineering, Kyungpook National University) ;
  • Park, Se-Kwang (Department of Electrical Engineering, Kyungpook National University)
  • 발행 : 1994.07.21
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초록

Applications of poly-Si layers which are important as sensing and structural material of various sensors were reviewed in this research. A piezoresistive pressure sensor with piezoresistors has sensitivity of $6.93{\mu}$ V/(VmmHg) within 300mmHg. Temperature sensor was studied with measurement range of $-40{\sim}140^{\circ}C$ and $400{\sim}800^{\circ}C$ using boron-doped and undoped poly-Si resistors, respectively. Poly-Si layer was used to transduce volume change of polyimide to stress of silicon diaphragm for humidity sensor.

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