Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)
- 1994.07b
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- Pages.1226-1228
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- 1994
Applications of Polycrystalline Silicon Layer to Sensors
다결정실리콘 박막의 센서에의 응용
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Park, Sung-June
(Department of Electrical Engineering, Kyungpook National University) ;
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Park, Se-Kwang
(Department of Electrical Engineering, Kyungpook National University)
- Published : 1994.07.21
Abstract
Applications of poly-Si layers which are important as sensing and structural material of various sensors were reviewed in this research. A piezoresistive pressure sensor with piezoresistors has sensitivity of
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