Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)
- 1993.11a
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- Pages.268-271
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- 1993
Development and Operation Characteristics of XeCl Excimer Laser
방전여기 XeCl 엑시머레이저의 제작 및 동작특성
- Jin, Yun-Sik (Korea Electrotechnology Research Institute) ;
- Lee, Hong-Sik (Korea Electrotechnology Research Institute) ;
- Kim, Hee-Je (Korea Electrotechnology Research Institute) ;
- Rho, Young-Soo (Korea Electrotechnology Research Institute) ;
- Kim, Youn-Taeg (Korea Electrotechnology Research Institute)
- Published : 1993.11.26
Abstract
Discharge pumped high power excimer laser is a very useful light source of ultraviolet region. In this paper. the design and operation characteristics of UV pre-ionized discharge pumped XeCl laser are discussed. Maximum output power of 890mJ at the efficiency of 1.4% was achieved with 35kV charging voltage, 3.4atm of total pressure and 10pps of pulse repetition rate. Optimum HCl pressure is considered to be between 2.5 and 3.5torr.
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