Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)
- 1993.11a
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- Pages.264-267
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- 1993
A Study on the Propensities of Helicon Plasma and Application for Etching
헬리콘 플라즈마 물성특성 및 식각응용에 관한 연구
- Lee, Byoung-Ill (Department of Electrical Engineering, Seoul National University) ;
- Do, Hyun-Ho (Department of Electrical Engineering, Seoul National University) ;
- Yang, Ill-Dong (Department of Electrical Engineering, Seoul National University) ;
- Whang, Ki-Woong (Department of Electrical Engineering, Seoul National University)
- Published : 1993.11.26
Abstract
A high plasma density of
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