Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)
- 1993.11a
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- Pages.210-212
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- 1993
Fabrication of Two One-Way Silicon Micro Valves using Boron Etch Stop Layer
붕소 식각 정지층을 이용한 두 개의 한 방향 실리콘 미세 밸브의 제작
- Seo, Jeong-Deok (Dept. of Control and Instrumentation Engr., Ajou University) ;
- Yang, Eui-Hyeok (Dept. of Control and Instrumentation Engr., Ajou University) ;
- Yang, Sang-Sik (Dept. of Control and Instrumentation Engr., Ajou University)
- Published : 1993.11.26
Abstract
In this paper, a silicon microvalve has been fabricated using micromachining technology. The valve consists of the several thin silicon diaphragms which are designed to open and close depending on the pressure difference. It is supposed to pass fluids in only one direction. The thin diaphragms are fabricated by boron etch stop using an anisotropic etchant, EPW. The fabricated valve has been tested for various pneumatic pressure. According to the experimental results, the slit width of the valve increases as the pneumatic pressure increases.
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