Proceedings of the Materials Research Society of Korea Conference (한국재료학회:학술대회논문집)
- 1993.05a
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- Pages.80-81
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- 1993
Processing of $SrTiO_3$ Thin Film and Barrier Layer on Si Substrate
Si 기판상의 $SrTiO_3$ 박막과 Barrier Layer 제조
Abstract
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