Proceedings of the Materials Research Society of Korea Conference (한국재료학회:학술대회논문집)
- 1993.11a
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- Pages.149-149
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- 1993
Effect of Substrate Temperature on the Recrystal1ization of Amorphous Si1icon Films Deposited by PECVD
증착 온도가 PECVD 비정질 Si 박막의 고상 결정화에 미치는 영향
Abstract
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