Proceedings of the Materials Research Society of Korea Conference (한국재료학회:학술대회논문집)
- 1993.11a
- /
- Pages.121-122
- /
- 1993
In sifu crystallization behavior and characteristics of $BaTiO_3$ thin films by RF magnetron sputtering
RF magnetron sputtering법에 의해 층착된 $BaTiO_3$ 박막의 in situ 결정화 양상 및 특성
Abstract
Keywords