한국재료학회:학술대회논문집 (Proceedings of the Materials Research Society of Korea Conference)
- 한국재료학회 1993년도 추계 학술발표 강연 및 논문 개요집
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- Pages.18-18
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- 1993
SELECTIVE AREA DEPOSITION OF BORON AND DELTA DOPING OF SILICON BY SYNCHROTRON RADIATION FOR ULSI APPLICATION
- Lee, Sunwoo- (Samsung Electro-Mechanics Co., Research & Development Center, Laboratory for Thin Film Devices) ;
- Peter-A.Dowben (University of Nebraska, Department of Physics and Center for materials Research & Analysis, Lincoln, USA)
- 발행 : 1993.11.01