Three Dimensional Analysis of Device Cell Structure

  • Hyung-Ho ppark (Semiconductor Technology Division, ETRI, Taejeon, Korea) ;
  • Hyung-Mun Kim (Semiconductor Technology Division, ETRI, Taejeon, Korea) ;
  • Hee-Tae Lee (Semiconductor Technology Division, ETRI, Taejeon, Korea) ;
  • Sahn Nahm (Semiconductor Technology Division, ETRI, Taejeon, Korea) ;
  • Sang-Gi Kim (Semiconductor Technology Division, ETRI, Taejeon, Korea) ;
  • Joong-Whan Lee (Semiconductor Technology Division, ETRI, Taejeon, Korea) ;
  • Byong-Hwa Koak (Semiconductor Technology Division, ETRI, Taejeon, Korea) ;
  • Kyoung-Ik Cho (Semiconductor Technology Division, ETRI, Taejeon, Korea) ;
  • Young-Il Kang (Semiconductor Technology Division, ETRI, Taejeon, Korea)
  • Published : 1993.07.01