Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 1993.07a
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- Pages.58-59
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- 1993
The Effects of Interconnection Geometry on the Electromigration in Al-1%Si Thin Film Metallizations
Al-1%Si 박막금속화의 Electromigration에 대한 Interconnection Geometry 효과
Abstract
Keywords