광간섭법을 이용한 절대높이 측정 정밀도 향상에 관한 연구

This paper proposes a high precision measurement technique to obtain the height of gage block. The proposed technique is consisted of two steps : In the first step, laser position transducer and electric micrometer are adopted to obtain a coarse value of the height of gage block, and then, second, heterodyne laser interferometry is adopted to acquire the precision value. The experiment results show that accuract in the order of a few nanometer is achieved for the gage blacks of as high as a few millimeter.