연삭가공 표면 거칠기 기상계측 방법

This paper presents a new method based upon the light scattering concept for on-the-machine measurement of roughness of ground surfaces. The present method utilizes fluxes of scattered lights condensed through lenses aligned along the specular direction. A theorctical analysis is preformed for the purpose of investigating the possibility of the method as well as determining the experimental condition. Experiment is also performed to show the effectiveness of the proposed method. The theoretical and experimental results show that the proposed method has a potential to identify a wide range of surface roughness and is robust enough to be useful in on-the-machine measurement of roughness of ground surfaces.