A Stuey on the Design of Nano-Saboratory for the Control of Environmental Parameters

Nano-Laboratory 설계환경 조절에 관한 연구

To disign and build a ultra-precision laboratory which has been required for high technology in many areas, the environmental parameters such as temperature, humidity,vibration and nosic are controlled precisely. To absorb the outside vibration, particular concrete blocks were designed and set under the laboratory. The inside room temperature were controlled in local area within .+-. 0.3 .deg. c. It was efficient to induce laminar flow in air conditioning system for the control of room temperature, humidity etc. The control conditions should be determined according to their specific purposes. Also, the control method will be different for their respective environmental conditions.