Fault detection of shadow mask by use of spatial filtering

  • Published : 1993.10.01

Abstract

In KACC'91 and '92 conference, we proposed a method of automatically detecting the shape of the faulty holes in a shadow mask by use of CCD ca.mera and image data processing technic. In this method, two adjoining test areas from one image data. of the shadow mask are taken and comparing the shape of holes in these two areas, we can detect the faults in the shadow mask. In this paper, a method is described by use of spatial filtering of effectively finding the faulty holes from the difference image data between the two tested image data. The main role of the filter is to remove sampling errors occurring at the edge of the holes. And the second role is not only to find the existence of faulty holes but also exactly express the shape of faulty holes. Computer simulations and actual experiments with shadow masks have shown that this method of fault detection is very effective for practical use.

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