부분수산법에 의한 PZT 세라믹스의 저온소성과 전기적 제특성

Electrical Properties of PZT Ceramics Fabricated by Partial Oxalate Method at Low Sintering Temperature

Pb(Zr,Ti)$O_3$ powders were synthesized by the partial oxalate method and the modified partial oxalate method, where the difference between the two is the use of pre-reacted (Zr,Ti)$O_2$ in the former method. When compared with conventional mixed oxide method, calcination temperature can be reduced to less than $700^{\circ}C$ by both partial oxalate methods, and the resulting particle size was finer and more uniform. Using partial oxalate-derived PZT powders, sintering temperatures can also be reduced as low as $950^{\circ}C$ without sacrificing desired dielectric and piezoelectric properties, such as relative permittivity, electromechanical coupling factor, and piezoelectric coefficient. Two partial oxalate methods yield ceramics with almost the same physical and electrical properties, so that the step of producing ZTO powder does not seem to be necessary.