Proceedings of the Materials Research Society of Korea Conference (한국재료학회:학술대회논문집)
- 1992.05a
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- Pages.11-11
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- 1992
PLASMA ASSISTED DEPOSITION OF $SiO_2$ FILMS
- Falcony, C. (CINVESTAV, IPN, Physics Department) ;
- Ortiz, A. (Instituto de Incistigaciones in Materinles-UNAM) ;
- Garcia, M. (Instituto de Incistigaciones in Materinles-UNAM)
- Published : 1992.05.01
Abstract
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